Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-Electromechanical Systems?

Micro- and nano-electromechanical systems for [bio]molecular analysis

[Bio]chemical sensors, defined as devices which convert a chemical state into an electrical signal [1], have been the subject of a strong development during the past few decades. A sensor has essentially two parts (Fig. 1): a detecting element, in which the presence of an external stimulus produces a change of some property (optical, mechanical, electrical ...), and a transducing element, which...

Monocrystalline silicon carbide nanoelectromechanical systems

SiC is an extremely promising material for nanoelectromechanical systems given its large Young’s modulus and robust surface properties. We have patterned nanometer scale electromechanical resonators from single-crystal 3C-SiC layers grown epitaxially upon Si substrates. A surface nanomachining process is described that involves electron beam lithography followed by dry anisotropic and selective...

performance of micro-electromechanical systems devices for space applications

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Energy Harvesting for Micro-electromechanical-systems (mems)

223 words) .......................................................................................................... 2 INTRODUCTION (758 words) .................................................................................................. 3 A CRITICAL LITERATURE REVIEW (1867 words) .................................................................... 6 SUMMARY AND CONCLUSION (682 words) ......

Surface Acoustic Waves and Nano–Electromechanical Systems